Surface micromachining of polydimethylsiloxane for microfluidics applications
نویسندگان
چکیده
منابع مشابه
Surface Micromachining of Polydimethylsiloxane (pdms) for Microfluidic Biomedical Applications
A major technical hurdle in microfluidics is the difficulty in achieving high fidelity lithographic patterning on polydimethylsiloxane (PDMS). Here, we report a simple yet highly precise and repeatable PDMS surface micromachining method using direct photolithography followed by reactive ion etching (RIE). Our method to achieve surface patterning of PDMS applied an O2 plasma treatment to PDMS to...
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A major technical hurdle in microfluidics is the difficulty in achieving high fidelity lithographic patterning on polydimethylsiloxane (PDMS). Here, we report a simple yet highly precise and repeatable PDMS surface micromachining method using direct photolithography followed by reactive ion etching (RIE). Our method to achieve surface patterning of PDMS applied an O(2) plasma treatment to PDMS ...
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In the last decade, examples of devices manufactured with SUMMiT technology have demonstrated the capabilities of polysilicon surface micromachining [1]. Currently we are working on enhancements to this technology that utilize additional structural layers of silicon nitride to enable Microfluidics and BioMEMS applications. The addition of the silicon nitride layers allows the fabrication of mic...
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Here we demonstrate the microfabrication of deep (> 25 microns) polymeric microstructures created by replica-molding polydimethylsiloxane (PDMS) from microfabricated Si substrates. The use of PDMS structures in microfluidics and biological applications is discussed. We investigated the feasibility of two methods for the microfabrication of the Si molds: deep plasma etch of silicon-on-insulator ...
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ژورنال
عنوان ژورنال: Biomicrofluidics
سال: 2016
ISSN: 1932-1058
DOI: 10.1063/1.4964717